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RF-MBE Growth of Nitride Semiconductor on Si Substrate
RF-MBE Growth of Nitride Semiconductor on Si Substrate
2016
S. Koshiba
Ryo Takeguchi
Hiroki Heijyo
Kenya Ishihara
Fumiyasu Kubo
Hiroko Fujita
Kazuhiro Morishita
Yasuhiro Tanaka
Naoshi Takahashi
Noriaki Tsurumachi
Changsu Kim
Masahiro Yoshita
Hidefumi Akiyama
Keywords:
Substrate (chemistry)
Analytical chemistry
Semiconductor
Nitride
Materials science
Optoelectronics
si substrate
nitride semiconductors
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