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Encapsulation of Surface Impurities by Silicon Wafer-Bonding
Encapsulation of Surface Impurities by Silicon Wafer-Bonding
1990
Takao Abe
Atsuo Uchiyama
Katsuo Yoshizawa
Yasuyuki Nakazato
Mamoru Miyawaki
Tadahiro Ohmi
Keywords:
Impurity
Wafer
Nanotechnology
Composite material
Encapsulation (computer programming)
Materials science
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