Fourier ptychography at short wavelength with a synchrotron-based microscope (Conference Presentation)

Fourier Ptychography is a novel imaging technique consists in combining many coherent images acquired with various illumination angle and combined using an efficient phase retrieval algorithm. This technique allows to synthesize a larger numerical aperture than physically possible by the lens aperture alone, often limited by manufacturing capabilities. We present here an adaptation of the Fourier Ptychography technique to a synchrotron-based full-field microscope (SHARP) operating at 13.5nm (EUV wavelength) and demonstrate 26nm coherent resolution on reflective samples, alongside with quantitative phase imaging which allows to characterize sub-nanometer substrate roughness.