Picosecond electron-beam and synchrotron radiation pulse radiolysis for studies on electron-beam and x-ray resists

Picosecond electron-beam and synchrotron radiation pulse radiolysis are powerful method to study the reaction mechanism in irradiated electron beam and X-ray resists. The primary processes can be detected spectroscopically by using both pulse radiolysis systems. The details of the pulse radiolysis systems and a typical exsample of pulse radiolysis studies on the resists are introduced.