High Resolution Ptychographic Coherent Diffractive Imaging using Table-top XUV Sources

W. Eschen,G. K. Tadesse,R. Klas,Maxim Tschernajew,F. Tuitje,Christian Spielmann,Andreas Tünnermann,Jens Limpert,Jan Rothhardt

High Resolution Ptychographic Coherent Diffractive Imaging using Table-top XUV Sources

2018

W. Eschen
G. K. Tadesse
R. Klas
Maxim Tschernajew
F. Tuitje
Christian Spielmann
Andreas Tünnermann
Jens Limpert
Jan Rothhardt

We present a coherent imaging setup for extended samples achieving record-high resolution for non-periodic samples. A Siemens star pattern is imaged and the Rayleigh criterion is used to provide a reliable sub-50 nm resolution claim.

Keywords:

Photon counting
Extreme ultraviolet
Siemens star
Optics
Ptychography
Physics
Angular resolution
three dimensional imaging
coherent imaging
high resolution

Correction
Source
Cite
Save
Machine Reading By IdeaReader

References

Citations