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Strain Modification of PECVD Nitride By Plasma Immersion Ion Implantation Processes
Strain Modification of PECVD Nitride By Plasma Immersion Ion Implantation Processes
2020
Laurent Lachal
Christophe Plantier
Franck Torregrosa
Cédric Aubert
Jean-Michel Pedini
Gaël Borvon
Marianne Coig
Frédéric Milesi
Heimanu Niebojewski
Frédéric Mazen
Keywords:
Materials science
Nitride
Plasma-immersion ion implantation
Plasma-enhanced chemical vapor deposition
Composite material
Strain (chemistry)
Correction
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