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XPS Study of Nitrided Hf-based high-k dielectrics
XPS Study of Nitrided Hf-based high-k dielectrics
2006
F. S. Aguirre-Tostado
A. Herrera-Gomez
Moon J. Kim
Bruce E. Gnade
Robert M. Wallace
Quevedo López
P. D. Kirsch
Keywords:
High-κ dielectric
Nitrogen
Dielectric
X-ray crystallography
Nitriding
Thermal stability
Materials science
X-ray photoelectron spectroscopy
Nuclear magnetic resonance
Analytical chemistry
Correction
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