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Three Dimensional Assembly in Directed Self-assembly of Block Copolymers
Three Dimensional Assembly in Directed Self-assembly of Block Copolymers
2016
Tamar Segal-Peretz
Chun Zhou
Jiaxing Ren
Takahiro Dazai
Leonidas E. Ocola
Ralu Divan
Paul F. Nealey
Keywords:
Nanotechnology
Copolymer
Self-assembly
Materials science
Lithography
Transmission electron microscopy
Metrology
contact hole
directed self assembly
Correction
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