A low melting point metal and production technology rotatable target
2010
The present invention relates to a rotary low melting point metal target and production technology, the metal of the rotating target tube consists of a metal liner and a surrounding concentric outer tube (target) components. The melting point of the target rotation liner material is higher than 1000 ℃, the melting point of the target material is less than 800 ℃, in close connection with the target and the liners. In accordance with the embodiment of the present invention is designed, a cylindrical liner and mold in the same manner as the axis of the mold together form a lumen. An outer cylindrical mold has an annular zone melting apparatus. First, the liner and the mold is preheated, and then the molten metal into a mold lumen. After the molten metal is condensed by the zone melting method will move to the target impurities in the target discharge end. If further remelting, fast-setting, can be obtained with high purity, fine grain target. After release of the high end cut impurities. This method can produce high purity 5N ~ 8N tin, zinc, indium, aluminum, bismuth, antimony and other metal target and a single-alloy target of these low melting point metal as a main element.
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