Introducing a well-ordered volume porosity in 3-dimensional gold microcantilevers

2013 
The purpose of the present work is the introduction of a combined bottom-up and top-down approach to generate 3-dimensional gold microcantilevers, where the porosity in the volume of the free-standing microstructure is well-controlled. By combining the elaboration of a colloidal crystal, followed by electrodeposition, with a sacrificial layer process, free-standing macroporous gold cantilevers are fabricated collectively. In order to validate the proposed concept, a simple application to humidity sensing is evaluated using the devices as mass sensors. A large sensitivity of −529 ppm/%RH and low discrepancy are obtained experimentally, confirming the promising application potential of this original architecture.
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