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Plasma diagnostics of carbon-HiPIMS for depositing DLC film (3)
Plasma diagnostics of carbon-HiPIMS for depositing DLC film (3)
2021
Takayuki Ohta
Jo Matsushima
Akinori Oda
Hiroyuki Kousaka
Keywords:
Amorphous carbon
Optoelectronics
Diamond-like carbon
High-power impulse magnetron sputtering
Materials science
Carbon
Plasma diagnostics
Correction
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