Highly efficient ultraviolet high-harmonic generation in indium tin oxide film originating from enhanced driving field

High-harmonic generation in the ultraviolet region is promising for wireless technology used for communications and sensing. However, small high-order nonlinear coefficients prevent us from obtaining high conversion efficiency and functional photonic devices. Here, we show highly efficient ultraviolet harmonic generation extending to the fifth order directly from an epsilon-near-zero indium tin oxide (ITO) film. The real part of the annealed ITO films was designed to reach zero around 1050 nm, matching with the central wavelength of an Yb-based fiber laser, and the internal driving electric field was extremely enhanced. A high energy conversion efficiency of 10−4 and 10−6 for 257.5 nm (fourth-order) and 206 nm (fifth-order) ultraviolet harmonic generation was obtained, which is at least 2 orders of magnitude higher than early reports. Our results demonstrate a new route for overcoming the inefficiency problem and open up the possibilities of compact solid-state high-harmonic generation sources at nanoscale.