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PZT THIN FILM ACTUATOR WITH INTEGRATED BURIED PIEZORESISTOR FOR HIGH STABILITY POSITION CONTROL
PZT THIN FILM ACTUATOR WITH INTEGRATED BURIED PIEZORESISTOR FOR HIGH STABILITY POSITION CONTROL
2020
Andrea Vergara
Takashiro Tsukamoto
Weileun Fang
Shuji Tanaka
Keywords:
position control
Thin film
Materials science
Actuator
Optoelectronics
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