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Development of composite vertical wet etching for silicon material
Development of composite vertical wet etching for silicon material
2014
Mao Jung Huang
Chun-Ming Chang
Nien-Nan Chu
Yu-Hsiang Tang
Chii Rong Yang
Keywords:
Dry etching
Surface micromachining
Reactive-ion etching
Etching (microfabrication)
Isotropic etching
Composite material
Microelectromechanical systems
Materials science
Metallurgy
Silicon
Composite number
Correction
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