Optical Particle Detection in Liquid Suspensions with a Hybrid Integrated Microsystem

Abstract A compact, robust and portable system for optical particle detection in liquid suspensions, achieved through the hybrid integration of commercial components, such as VCSELs and microlenses, in a silicon micromachined structure is presented. We demonstrate the feasibility of fabricating a device providing up to 4 collimated laser beams, with the ability of detecting and distinguishing microparticles of several diameters, even in mixed suspensions. This optical microsystem represents an alternative design for microflow cytometers based on optical fibres, and is aligned with the current tendency set by the Point-of-care devices.