Phase aberration compensation of digital holographic microscopy with curve fitting preprocessing and automatic background segmentation for microstructure testing

Abstract In the digital holographic microscopy, the phase aberration is a key problem limiting the quantitative phase measurement, especially for the microstructure whose phase distribution is dense with few and discontinuous background region. A numerical phase aberration compensation method with global curve fitting preprocessing and automatic extraction of the background region for microstructure testing is proposed. The global curve fitting is implemented to compensate most of the tilt, quadratic and partial high order aberrations and make the profile of the measured object significantly distinguishable. Then the background region is automatically extracted by directly segmenting the converted grayscale phase image. At last, the Zernike polynomial fitting is performed on the extracted background region, and the obtained coefficients are used to calculate the phase aberration of the whole phase image. Simulation and experimental results demonstrated that the proposed method is able to accurately extract background region and compensate the phase aberration for the complicated dense microstructure.