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An Innovative Jet Spray for Better Particle Removal Efficiency in Single Wafer Damage-free Cleans for 65nm Node and Beyond
An Innovative Jet Spray for Better Particle Removal Efficiency in Single Wafer Damage-free Cleans for 65nm Node and Beyond
2007
Wei Lu
Bo Xie
Zhiyong Li
Keywords:
Nanotechnology
Particle
Wafer
Materials science
Engineering physics
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