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Low temperature formation of SiC thin film by chemical vapor deposition using vinylsilane precursor
Low temperature formation of SiC thin film by chemical vapor deposition using vinylsilane precursor
2017
Takuma Doi
Wakana Takeuchi
Yong Jin
Hiroshi Kokubun
Shigeo Yasuhara
Osamu Nakatsuka
Shigeaki Zaima
Keywords:
Thin film
Chemical vapor deposition
Hybrid physical-chemical vapor deposition
Combustion chemical vapor deposition
Semiconductor
Organic chemistry
Materials science
Vinylsilane
Chemical engineering
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