Traceably calibrated scanning Hall probe microscopy at room temperature
2020
Abstract. Fabrication, characterization and comparison of gold and
graphene micro- and nanoscale Hall sensors for room temperature scanning
magnetic field microscopy applications are presented. The Hall sensors with
active areas from 5 µ m down to 50 nm were fabricated by electron-beam
lithography. The calibration of the Hall sensors in an external magnetic
field revealed a sensitivity of 3.2 mV A −1 T −1 ± 0.3 %
for gold and 1615 V A −1 T −1 ± 0.5 % for graphene at room
temperature. The gold sensors were fabricated on silicon nitride cantilever
chips suitable for integration into commercial scanning probe microscopes,
allowing scanning Hall microscopy (SHM) under ambient conditions and
controlled sensor–sample distance. The height-dependent stray field
distribution of a magnetic scale was characterized using a 5 µ m gold
Hall sensor. The uncertainty of the entire Hall-sensor-based scanning and
data acquisition process was analyzed, allowing traceably calibrated SHM
measurements. The measurement results show good agreement with numerical
simulations within the uncertainty budget.
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