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MgZnO MSM UV Photodetector with Different Annealing Temperatures by RF Magnetron Sputtering
MgZnO MSM UV Photodetector with Different Annealing Temperatures by RF Magnetron Sputtering
2020
J. S. Jheng
C.K. Wang
Y. Z. Chiou
S.P. Chang
S. J. Chang
Keywords:
Chemistry
Sputter deposition
Analytical chemistry
Photodetector
Annealing (metallurgy)
Optoelectronics
Correction
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