A Piezoelectric Micro Ultrasonic Motor with High Q and Good Mode Match

The ultrasonic motors (USM) based on microelectromechanical systems (MEMS) technology utilize the inverse piezoelectric effects to drive the rotor through the friction force to realize the torque output. Therefore, the generation of a stable traveling wave within the stator is a key to USM performance, which heavily depends on the quality factor ( Q ) and the mode match level of a stator resonator. The current ring stators of micromotor exhibited an apparent mode mismatch and a relatively low Q value due to the displacement constraints and anchor loss of supporting beams. This article, through the modal analysis and energy dissipation evaluation of stators, proposes an elaborate design to improve the mode match and Q value by positioning the supporting beams at the saddle points of the B 13 modal shape and introducing a buffering annular frame between beams and substrate. The designed stator has the natural frequency of 101.63 and 100.90 kHz and Q value of 89.5 obtained from the finite element method. And the prototype experiment shows the natural frequencies of two modes are 100.76 and 101.5 kHz, respectively, the maximum deflection of the stator under driving voltage of 0.5 and 1 V are 3.96 and 4.43 μ m, respectively, and the Q value is 84.58. Both the frequency and rotation tests indicate the proposed motor displays, a much higher Q , and extremely better mode match than current ones.