Compression zone of a magnetoplasma compressor as a source of extreme UV radiation

Results from experimental studies of extreme UV (EUV) radiation from the compression zone of a magnetoplasma compressor (MPC) operating with xenon are presented. Two MPC operating modes that differ in the method of xenon injection into the discharge were studied. It is shown that EUV radiation in the wavelength range of 5–80 nm is emitted from the compression zone. In the MPC operating mode with local xenon injection directly into the compression zone surrounded by helium plasma, the radiation power reaches it peak value of 16–18 kW in the wavelength range of 12.2–15.8 nm.