A Mems Accelerometer with an Auto-Tuning System Based on an Electrostatic Anti-Spring

This paper describes a MEMS accelerometer with an auto-tuning system based on an electrostatic anti-spring. The sensitivity of the accelerometer can be tuned automatically to change its dynamic range and bandwidth according to acceleration inputs. A detailed theoretical analysis and experimental verification were conducted. There is a good agreement between experimental results theoretical calculations. The auto-tuning design has a larger displacement under different acceleration inputs, compared with a conventional design. When the acceleration input is 17.45 μg, the sensitivity of the auto-tuning design (18.4 V/g) is 14.4 times of that of the conventional design (1.28 V/g). The sensitivity is higher for lower acceleration inputs.