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Doping of β-Ga2O3 Layers by Zn using Halide Vapor Phase Epitaxy Process
Doping of β-Ga2O3 Layers by Zn using Halide Vapor Phase Epitaxy Process
2021
Galia Pozina
Chih-Wei Hsu
Natalia Abrikossova
Carl Hemmingsson
Keywords:
Doping
vapor phase
Halide
Analytical chemistry
Materials science
Epitaxy
process
zn doping
Correction
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