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Formation of High Density FeSi Nanodots Induced by Remote H 2 -Plasma Exposure
Formation of High Density FeSi Nanodots Induced by Remote H 2 -Plasma Exposure
2019
Yasushi Hashimoto
Katsunori Makihara
Akio Ohta
Mitsuhisa Ikeda
Seiichi Miyazaki
Atsushi Kohno
Keywords:
Materials science
Nanodot
Analytical chemistry
high density
plasma exposure
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