Principles of molecular precursor selection for aerosol synthesis of materials
1994
Abstract The influence of precursor design on gas-phase and liquid/solid-phase (spray pyrolysis) aerosol materials synthesis is described. The necessity for the incorporation of reaction mechanisms that lead to complete removal of organic by-products is emphasized by the examples of aerosol-assisted CVD of Cu and Ag films and the formation of ZnS films and powders. The role of “single-source” precursors in the formation of complex materials including ZnS, perovskite phase PbTiO 3 and yttrium aluminum garnet, Y 3 Al 5 O 12 is described.
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