Sensor device, an input device and electronic equipment

2013 
A sensor capable of detecting device small pressing force, to provide an input device and an electronic apparatus. A sensor apparatus includes a first surface and a second surface, the support layer, and the capacitive element. The the first surface and the second surface facing each other. The support layer and the first structure having a first height is partially disposed between the first surface and the second surface, and the first surface and the second surface having a space portion formed between the. The capacitive element has a first electrode disposed on one of the first surface and the second surface, and a second electrode disposed opposite to the first electrode , the change in capacitance between the first electrode and the second electrode in response to changes in distance between the first surface and the second surface facing through the space It is configured to occur. .The
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