Fabrication and mechanical study of a titanium micro-membrane for in vivo pressure monitoring

We herein introduce the fabrication and characterization of 22 Ti micro-membranes with an embossed structure. To date, this is the first titanium membrane micromachined in bulk Ti wafer ever reported in literature. This membrane will further be a part of an implantable MEMS capacitive sensor used for in vivo pressure monitoring in the human body. While pressure is known to be one of the most relevant parameters to help doctors monitoring patient health, in the case of active medical implants this has long been an unachievable goal until recently. In this context, the development of Ti-based microsensors appears as a promising way to overcome current issues related to the use of nonbiocompatible materials such as silicon and its complex, bulky and costly packaging.