Inductor structure and manufacturing method thereof

2015 
The invention discloses an inductor structure and a manufacturing method thereof. The inductor structure comprises a bottom annular metal layer, a middle metal layer and a top annular metal layer, wherein the bottom annular metal layer comprises a first interface, a first metal body layer and a second interlayer which are connected; the middle metal layer is located on the bottom annular metal layer and comprises a third interface, a second metal body layer and a fourth interface which are connected, the second metal body layer extends to the third interface from the third interface in a spiral ring shape, the third interface is located in a spiral ring and electrically connected with the second interface, and the fourth interface serves as the output end of the inductor structure; the top annular metal layer is located on the middle metal layer and comprises a fifth interface, a third metal body layer and a sixth interface which are connected, the sixth interface is electrically connected with the third interface of the middle metal layer, and the fifth interface and the first interface of the bottom annular metal layer are electrically connected to serve as the input end of the inductance structure. The inductance structure ensures quality factors, reduces occupied area and ensures symmetry of inductor electric properties.
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