Flow control device and a program
2013
Providing a flow control device and a program capable of realizing a high-speed response control without overshoot. It is connected to the valve body constituting the flow control valve, by actuating the valve body, and a piezoelectric element for adjusting the flow rate, and a drive circuit for driving the piezoelectric element by applying a voltage to the piezoelectric element an accepting means for accepting a target flow rate, to the flow rate the receiving unit is changed so as to coincide with the target flow rate has been accepted, and output means for outputting a signal corresponding to the voltage applied to the piezoelectric element to the drive circuit in the flow control device comprising, said output means, when the target flow rate acceptance unit accepts changes, transiently outputs a signal corresponding to a voltage value different from the target voltage value corresponding to the target flow rate after the change, then are to output a signal corresponding to the voltage change to converge to the target voltage value.
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