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DyScHfOx as High-κ Gate Dielectrics: Structural and Electrical Properties
DyScHfOx as High-κ Gate Dielectrics: Structural and Electrical Properties
2007
Christoph Adelmann
Sven Van Elshocht
P. Lehnen
Thierry Conard
Alexis Franquet
Chao Zhao
Lars-Ake Ragnarsson
Vincent S. Chang
Hag Ju Cho
Yu-HongYu
Stefan De Gendt
Keywords:
Dielectric
Condensed matter physics
Materials science
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