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Experiments on REM and SREM using a Tem/Stem Microscope with a Configurable Angle-Resolving Detector
Experiments on REM and SREM using a Tem/Stem Microscope with a Configurable Angle-Resolving Detector
1990
H. Banzhof
I Daberkow
Keywords:
Optics
Microscope
Materials science
Detector
Correction
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