Practical Properties of Thermochromically Induced Super-Resolution Read-Only Memory Disk (TSR-ROM)

Super-resolution effects and practical properties of a thermochromic mask layer for a read-only memory disk are evaluated using a conventional disk tester with a 635 nm light source and a 0.6 numerical aperture (NA) pickup. A carrier-to-noise ratio (C/N) of over 40 dB is obtained at a pit length of 0.20 µm which is far smaller than the resolution limit. Sufficient tilt margins and power margin are obtained at the capacity of 11 GB.