Internal Resonant Oscillation in Coupled Resonators for High-resolution Mass Sensing with A Wider Coupling Range

This paper, mainly reports a coupled cantilever structure applicable to mass or gas sensing applications with a higher resolution in a wider coupling range. Based on the coupled cantilevers with different rectangle geometry, we design a π-shaped coupled cantilever structure with triple frequency ratio, which provides mass or gas sensing with larger adsorption area. In the present work, internal resonance characteristics of the proposed structure are studied with different mass perturbations, and the coupling tongue characteristics with respect to the coupling range are further evaluated. Compared to that of the rectangular coupled cantilevers, on the one hand, a wider coupling range under the same applied voltage can be obtained, while on the other hand, a higher proportion of the third harmonic indicates a better resolution. The above preliminarily reveals the potential superiority of the internal resonant oscillation observed in the proposed the π-shaped coupled cantilever structure when applied to mass or gas sensing.