Method and device for coating surfaces with plasma.

Process for coating surfaces - in which a plasma beam (28; 28?; 28?) is generated by passing a working gas through an excitation zone (12), - in which it feeds precursor separately from the working gas within the plasma beam material - in which reacting the precursor material using the plasma beam and - in which the reaction product on the surface (34) is deposited , - where both the reaction and also the deposition take place under atmospheric pressure characterized in that by placing an alternating high frequency voltage arc discharge is generated in the electrodes (10, 18) placed within the activation zone.