Calibration of Electrochemical Capacitance-voltage Method on Pyramid Texture Surface Using Scanning Electron Microscopy☆

Abstract The electrochemical capacitance-voltage (ECV) technique can practically profile carrier concentrations on textured surfaces, but reliable calibration of the surface area is strongly demanded since it plays a decisive role in calculating both the carrier concentration and the profiling depth. In this work, we calibrate the area factor of pyramidally textured surfaces by comparing ECV profiles with cross-sectional scanning electron microscopy image, and found out it is 1.66, and not 1.73 which was formerly assumed. Furthermore, the calibrated area factor was applied to POCl3 and BBr3 diffusions which resulted in comparable diffusion profiles for both textured and polished surfaces.