Heating device and heating chamber
2015
Disclosed are a heating device and a heating chamber. The heating device comprises a base plate (21), at least three supporting posts (22), and a heating assembly, wherein the at least three supporting posts are arranged vertically on the base plate and distributed at intervals along the circumferential direction of the base plate, and the top ends of the at least three supporting posts form a bearing surface for supporting a heated member (23). The heating assembly comprises heating light tubes (24) and a thermal radiation shielding assembly, wherein the heating light tubes are arranged above the base plate and located below the bearing surface to radiate heat towards the bearing surface, and the projection of an effective heating area, formed by the uniformly distributed heating light tubes, on the base plate covers the projection of the bearing surface on the base plate; and the thermal radiation shielding assembly is used for shielding the heat radiated by the heating light tube towards the periphery and bottom thereof. The invention not only has a wide application range, but can also improve the heating efficiency and heating uniformity.
Keywords:
- Correction
- Source
- Cite
- Save
- Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI