Investigation on probe positioning errors affecting on-machine measurements on ultra-precision turning machines

Abstract The measurement of machined surfaces directly on ultra-precision turning machines yields to notable advantages, e.g. in correcting formdeviations without re-clamping. In the present work, a one-dimensional probe is moved by the machine axes to optically scan the workpiece. The integration and positioning methodology of the probe within the machine tool coordinate system as well as a measurement simulation model are presented. Simulations and experiments are conducted to identify the influence of positioning errors of the probe regarding the measurement results. The measurement error along the spindle axis, which mainly affects the measured form deviation, depends on the gradient of the geometry to be measured.