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Uniformity Improvement in SiC Epitaxial Growth by using Si-Condensation
Uniformity Improvement in SiC Epitaxial Growth by using Si-Condensation
2004
Shinsuke Harada
K. Nakayama
Makato Sasaki
Hiromu Shiomi
Keywords:
Composite material
Metallurgy
Epitaxy
Condensation
Materials science
Correction
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