69.1: Invited Paper: The Advantages of the Self‐Aligned Top Gate Oxide TFT Technology for AM‐OLED Displays

In recent years, a great deal of effort has been devoted to developing oxide TFTs for active-matrix displays. Especially, oxide TFTs are expected to take some space away from LTPS TFTs to drive the AM-OLED displays because of their low cost, high uniformity, and capability for large-size display manufacturing. A self-aligned top-gate TFT is proposed for the oxide TFT, and a method to improve the stability in terms of the bias temperature stress will be discussed.