Auger electron beam effects on electrical properties and surface composition of InP surfaces

Abstract We give results about InP composition and work function (WF) variations obtained respectively by Auger electron spectroscopy (AES) and the Kelvin method and show the spurious effects of the electron beam. From the Auger electron spectra, we deduce that whatever the preparation of the surface is, there is a tight correlation between the peaks of oxygen and phosphorus. In spite of a modification of the surface composition, this phenomenon is still observed after irradiation by a low electron current beam. Work function topographies reveal that the irradiated areas are several times higher than the beam diameter and the effects of electron beam quite different on clean and real surfaces.