Near atmospheric pressure plasma enhanced chemical vapor deposition for surface modification of selected materials
2015
Keywords:
- Chemical vapor deposition
- Atmospheric-pressure plasma
- Hybrid physical-chemical vapor deposition
- Combustion chemical vapor deposition
- Environmental chemistry
- Plasma processing
- Plasma-enhanced chemical vapor deposition
- Deposition (phase transition)
- Surface modification
- Chemistry
- Inorganic chemistry
- Chemical engineering
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