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Erosion of fluorinated diamond-like carbon films by exposure to soft X-rays
Erosion of fluorinated diamond-like carbon films by exposure to soft X-rays
2018
Kazuhiro Kanda
Hiroki Takamatsu
Eri Miura-Fujiwara
Hiroki Akasaka
Akihiro Saiga
Koji Tamada
Keywords:
Erosion
Soft X-rays
Diamond-like carbon
Optics
Physics
Composite material
Correction
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