Electromagnetic valve made in LTCC

This paper describes technology of the electromagnetic valve made in the LTCC (Low Temperature Co-fired Ceramics). The actuation is supplied by mutual reaction between a 3D coil and a neodymium magnet bonded to flexible membrane. Such solution has many advantages like short reaction time, small power consumption and relatively great attractive forces. The valve is built in a hybrid PDMS-LTCC technology. The microfluidics and coil parts are fabricated in the LTCC technology. The flexible section is manufactured using a PDMS (poly(dimethylsiloxane)) membrane bonded to the ceramic part by plasma oxidation. The magnet is fixed on the membrane surface. The LTCC material was chosen for the sake of chemical durability and possibility of 3D structures creating. The PDMS membrane provides simultaneously very good stability and high flexibility.