The Fabrication of the AlGaInP MQW Circular Ring Resonator Semiconductor Laser

Fabrication of an AlGalnP multiple quantum well semiconductor with a circular ridge waveguide ring resonator of 100 um diameter and 10 um width by using a novel UV laser-assisted cryo-etching technique is presented. It shows single-modes output at the threshold current density 82.5 A/cm 2 and 10 KHz pulse mode operation. The ring laser provides a promising photonic device for opto-electronic system integration applications.