Monolithic InP 100-Channel $\times$ 10-GHz Device for Optical Arbitrary Waveform Generation

We demonstrate monolithic integration of a 100-channel arrayed-waveguide grating (AWG) with 10-GHz channel spacing and 100 optically controlled Michelson-interferometer-based phase and amplitude modulators. The high-resolution AWG showed better than -15-dB crosstalk, and the modulator extinction ratio was better than 20 dB with either electrical or optical modulation control. The twin-integrated devices comprise a 50-mm diameter InP wafer with 1200 independent optoelectronic components.