Development of a 13.56MHz RF Implanter at PEFP

In the RF linac, the RF system is roughly half of the total cost. The 13.56MHz rf generator is cheap and readily available. Therefore, an rf implanter which uses a cavity operating at the frequency of 13.56MHz has now been considered and developed at Proton Engineering Frontier Project (PEFP) Korea. The implanter consists of a Duoplasmatron ion source, a triplet focusing magnet, an rf cavity, a bending magnet and an end chamber. It can accelerate particles up to 32keV/u for charge to mass ratio of 1/4. The implanter design concept, fabrication, testing and commissioning are presented in this presentation.