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Step and flash imprint lithography using UV-transparent, electrically conductive templates
Step and flash imprint lithography using UV-transparent, electrically conductive templates
2003
Todd C. Bailey
Jeffrey H. Baker
Diana Convey
William J. Dauksher
T Eschriech
Andy E. Hooper
S. Johnson
D. J. Resnick
A. Alec Talin
Carlton G Willson
Keywords:
Optoelectronics
Lithography
Indium tin oxide
Transparent conducting film
electrically conductive
Template
Materials science
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