Effects of gas pressure on nitride synthesis in metal plasma condensation

The effects of nitrogen pressure have been examined in nitride synthesis with a titanium plasma generated by a vacuum arc. The synthesis mechanisms differ for the pressure ranges P less than or equal to 0.07, 0.07 less than or equal to P less than or equal to 2, and P greater than or equal to 2 Pa. The differences are due to the variations in gas activation. Excited nitrogen plays the main part in the synthesis.