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Stress in NbC_xN_ Films Prepared by Reactive Rf Magnetron Sputtering
Stress in NbC_xN_ Films Prepared by Reactive Rf Magnetron Sputtering
1993
Shogo Kiryu
Akira Shoji
Satoshi Kohjiro
Shinji Kodaira
Keywords:
Sputter deposition
X-ray crystallography
Analytical chemistry
Physics
Correction
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